Product list Position > Products > Aeronex/Entegris Purifier & System > Regenerable Purification Systems
XCDA Purification System
Aeronex Infinity On-site Regenerable Systems for XCDA (Extrem Clean Dry Air)
EGPS Z on-site Regenerable Purification System for XCAD (Extrem Clean Dry Air)
Aeronex patented ambient temperature purification technologies
Inorganic Catalysist
Ambient temperature operation
In-situ automatic regeneration
Instant on (即时开机) – at startup and recovery from power off
Instant off (即时关机) – no complex purge/cooling to remove process gases
Operates at full flow rate with low pressure drop
Lowest cost-of-ownership (no replacement purifier beds needed / non-consumptive media)

Purification Systems for CDA (Air)

Removes Volatile Acids, Volatile Bases, Refractory Compounds, Condensable Organics, Non-Condensable Organics, Moisture

Outlet Impurities: <1 ppb
*(Outlet purity is significantly lower for some contaminants. Test data available upon request.)
 
 
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