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GasShield POU filters
Key GasShield®; POU features include:
9 LRV reduction value
Greater than 99.9999999% removal of all particles down to 0.0015µ;m; confirmed at the most penetrating particle size of 0.08µ;m.
High-performance operation
Operating temperatures up to 450°C (inert gas).
Able to withstand 1000 psi differential (69 bar) pressure @ 20°C.
All units are He leak-tested to a maximum 1 x 10-9 atm cc/sec.
Parts per trillion dry down achievable.
>1 trillion particles retained at the rated flow with zero particles detected downstream of tested filters.
Particle shedding of <1 particle/ft3 in accordance with SEMASPEC 93021511A-STD.
Rugged, high-quality construction
5 Ra surface finish on all internal hardware components.
Media is sintered with no binders or slurry so "the only material of construction of the media is the media."
Minimized surface area permits required flow characteristics at >9 log particle retention.
Filter element is designed to provide required flow at minimal pressure drop while minimizing surface area to provide virtually zero out-gassing.
All-welded construction eliminates out-gassing which accompanies polymeric filters.
Materials of construction
Standard GasShield POU filters are offered with 316L stainless steel porous metal media in 316L VAR/ electropolished stainless steel or nickel housings.
Mott also offers POU filters made of Hastelloy C-22 for use in corrosive gas applications such as HCI, HBr and WF6. We are the only filter supplier to the semi- conductor industry to offer filter media and housings in Hastelloy C-22.
We also manufacture nickel filters capable of filtration at higher flow rates. |
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Sentry Filters
SEN331NFF11
SEN280NFP11
SEN112NTT11
The high flow of Teflon ®; with the strength and long life of Mott porous metal
PENTA®; Nickel Media
True 9-LRV Filtration Efficiency of Particles as Small as 0.0015 μm @ 30 slpm
High Temperature Tolerance up to 450°C (Inert Gases)
Withstands High Pressures to 3000 PSIG (206.8 Bar) at 52°C
316L VAR Stainless Steel Housing Construction
1 x 10-9atm cc/sec Helium Leak Rating
< 1 Particle/Ft3 Particle Shedding
Maximum Forward and Reverse Differential Pressure of 500 PSIG (34.5 Bar) @ 52°C
Cleaned and Packaged in a Class 100 Clean Room |
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GasShield Defender Filters
All Stainless Steel with the Strength and Long Life of Mott Porous Metal
316L Stainless Steel Media
True 9-LRV Filtration Efficiency of Particles as Small as 0.0015 μm;
Confirmed at the Most Penetrating Particle Size of 0.08 μm @ rated flows
Operating Temperature up to 450°C (Inert Gases)
Operating Pressure to 3000 PSIG (206.8 Bar) at 52°C
316L VAR Stainless Steel Housing Construction
10 Ra Surface Finish on Gas Wetted Surfaces
1 x 10-9 atm cc/sec Helium Leak Rating
< 1 Particle/Ft3 Particle Shedding
Maximum Forward and Reverse Differential Pressure of 1000 PSID (68.9 Bar) @ 52°C
Manufactured, Cleaned and Packaged in a Class 100 Clean Room
Total Hydrocarbon Emissions Below Detectable Limits
Moisture Contribution <10 ppb After One Hour at Low-flow Ambient Purge |
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POU-05-FSV1 GasShield POU Gas Filter
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POU-05-NS GasShield POU Gas Filter
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POU-05-H HASTELLOY GasShield POU Gas Filter
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POU-05-S GasShield POU Gas Filter
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POU-015-S GasShield POU Gas Filter
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POU-3-S GasShield POU Gas Filter
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POU-3-NS GasShield POU Gas Filter
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POU-3-H HASTELLOY GasShield POU Gas Filter
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POU-3-HS HASTELLOY/316L SS GasShield POU Gas Filter
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POU-10-S GasShield POU Gas Filter
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POU-10-H HASTELLOY GasShield POU Gas Filter
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POU-10-HS HASTELLOY/316L SS GasShield POU Gas Filter
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POU-30-S GasShield POU Gas Filter
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GSP3752 GasShield Penta POU Gas Filter
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GSP3753 GasShield Penta POU Gas Filter
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GSP5754 GasShield Penta POU Gas Filter
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GSP315H1 GasShield Penta POU Gas Filter
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GSP315H3 GasShield Penta POU Gas Filter
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GSP515H1 GasShield Penta POU Gas Filter
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GSP515H3 GasShield Penta POU Gas Filter
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DEF331 DEFENDER POU Gas Filter
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DEF315H DEFENDER Gas Filter
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GSPMV GasShield Penta POU Gas Filter
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