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UV-206 Series
Piezoelectric Actuator Liquid Vaporizer
Outlines
VU-206 Series: Piezoelectric actuator-equipped liquid vaporizer unit
Efficient liquid vaporization control when used in combination with LM-2000P or LM-3000L Series
Features
Vaporization of the precisely-controlled liquid using piezoelectric actuator
Maximum operating temperature up to 160℃
Long-term leak tightness ensured using metal seal
Compact size |
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UV-430A Series
Outlines
VU-430A Series: Solenoid actuator equipped compact vaporizer unit
Efficient liquid vaporization control when used in combination with LM-3000L Series
Features
High precision liquid vaporization control using solenoid actuator
Compact design
With maximum operating temperature up to 200℃ ,this apparatus is most suitable for the use of liquid with low vapor pressure and low flow rate, such as low-k, high-k materials, and various metals
Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
Long-term leak tightness ensured using metal seal |
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VU-450 Series
Outlines
VU-450 Series: Solenoid actuator equipped compact vaporizer unit
Efficient liquid vaporization control when used in combination with LM-3000L Series
Features
High precision liquid vaporization system control using solenoid actuator
Larger vaporization chamber volume comparing with VU-430 Series
With maximum operating temperature up to 200°C, this apparatus is most suitable for the use of liquid with low vapor pressure and low flow rate, such as low-k, high-k materials, and various metals
Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
Long-term leak tightness ensured using metal seal |
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VU-550 Series
High Temperature Vaporizer
Outlines
VU-550 Series: Solenoid actuator-equipped, high temperature liquid vaporizer
Efficient liquid vaporization control when used in combination with LM-3000L Series
Features
High precision liquid vaporization system control using solenoid actuator
Vaporization chamber volume equivalent with VU-450 Series
With maximum operating temperature up to 300°C, VU-550 Series are most suitable for the use of liquid with low vapor pressure and high flow rate, such as, low-k, high-l materials, and ferroelectrics
Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
Long-term leak tightness ensured using metal seal |
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VU-900 Series
Light-contact Vaporizer
Outlines
VU-900 Series: Vaporizer providing stable vaporization of liquid source by preventing heat deterioration through reducing possibility of direct contact of liquid with vaporization chamber
Efficient liquid vaporization control when used in combination with LM-3000L Series
Features
High precision liquid vaporization system control using solenoid actuator
Most suitable for thermally unstable materials such as low-k, high-k, and various metals
Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
Long-term leak tightness ensured using metal seal |
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VU-1100 Series
High Flow Rate Vaporizer
Outlines
VU-1100 Series: Large-size vaporizer suitable for high-flow-rate liquid applications
Efficient liquid vaporization control when used in combination with LM-3000L Series and CV-1100 Series (control valve not included)
Features
Ensured high flow rate vaporization for large surface areas, such as LCD and solar panels, with higher vaporization capacity and higher heating power
High-flow-rate liquid vaporization is possible with nozzles uniformly introduce liquid into vaporization chamber through vessel walls, resulting in high efficiency heat conduction within the system |
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VF Series Heating Filter
Outlines
VF Series: Heating filter set at the back of a vaporization system for particles and mist elimination
Features
Filtration accuracy of 0.1 μm
Heatable up to 200°C
Metal-composed, clean casing
Thermal switch for abberant heating detection installed |
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contact support@mykrons.com for detail.
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