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MC-5000C Series EtherCAT Mass Flow Controller
Features
•; EtherCAT digital interface in accordance with SEMI E54.20 -1108
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-5000L Seires DeviceNet interface digital mass flow controllers
The MC-5000L series is divided into the MC-5100L, MC-5200L and MC-5250L according to differences in full scale ranges. They respectively have normally open or normally closed valve actuators.
Features
•; DeviceNet (ODVA) digital interface MFC
•; High performance (metal seal,piezo valve, high accuracy, multi-gas)
•; +24V single power operation
•; Surface mount interface
•; Top or side communication connectors installed for selection
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-700 Series Variable Range (VR) Mass Flow Controller
Variable Range (VR) Mass Flow Controller
Outlines
•; MC-700 Series: Mass flow controller equipped with 3 variable rotary switches for gas type selection and flow rate adjustments
Features
•; Rotary switch and VR function-installed units offer one to multiple devices support, eliminating the need for spare parts
•;Widely-used RS-485 interface equipped (Daisy-chain networks support up to 32 MFC connections)
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-3000L series
High performance digital mass flow controllers
The MC-3000L series is divided into the MC-3102L, MC-3202L and MC-3252L according to differences in full scale ranges. They respectively have normally open or normally closed valve actuators.
Outlines
•;MC-3000L Series: High performance mass flow controller with high accuracy of +/-1.0 S.P. guaranteed
Features
•; High accuracy +/-1.0 S.P.
•;RS-485 digital interface
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-3000S Series Low Differential Pressure Mass Flow Controller
Low Differential Pressure Mass Flow Controller
Outlines
•;MC-3000S Series: Mass flow controller equipped with LINTEC’s original low pressure differential device to operate at low differential pressure environmental
Features
•; Low pressure differential device
•;RS-485 digital interface
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-3000L-TC Series High Temperature Mass Flow Controller
Outlines
•;MC-3000l Series: Mas flow controller with Maximum operating temperature up to 120°C
Features
•; Maximum operating temperature up to 120°C
•;RS-485 digital interface
•; LINTEC’s original ambient temperature-compensated sensor incorporated
•; High functional upon installation of microprocessor
•; Diaphragm valve with small dead volume
•; High speed and high efficiency piezoelectric actuator
•; Long-term leak tightness ensured using metal seal
•; By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences |
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MC-3000E Series
Features
•; High performance digital MFC(Metal seal, piezo valve & high accuracy)
•; Surface mounting option available (SEMI Std. 79.88mm or 92mm)
•; RS232C or RS485 digital interface (on-board jumper selection)
•; Compatible with analog MFC
•; Flow totalize function
•; Alarm function
•; Optimized digital PID control
•; Patent ambient temperature-compensated flow sensor (USA and Japan) |
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