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| Liquid Source Vapor Filters |
| Low pressure drop, high particle capture efficiency, high particle holding capacity, all 316L Stainless Steel construction, ideal for very low pressure drop liquid vapor precursors filtration. |
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FLP515 Precursor Vapors Filter
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FLT515 High Flow Precursor Vapors Filter
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Liquid Source Vapor Filters
Designed for Low Pressure Drop Applications
High Flow Rate/Low Pressure Drop
Ideal for Low Vapor Pressure Gases from Liquid Source Volatile Precursors
High Temperature Tolerance (up to 450°C)
Maximum Inlet Pressure up to 2500 PSIG
100% 316L Stainless Steel Construction
1 x 10-9atm cc/sec Helium Leak Rate
Cleaned and Packaged in Class 100 Clean Room
Removal Rating: ≥ 0.0015 µ;m
9-Log filtration up to 100slpm |
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