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| Diffusers |
| A simple means to increase the through-put of a tool without affecting yield is to increase the speed of any steps not related to the actual formation of the semiconductor circuit. One such step is re-pressurization or "venting" of the load lock chamber, which creates a positive-pressure environment that inhibits particle migration from the clean room into the chamber. |
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NW50 Disc Type Gas Diffuser
GSE-FLG-2.0-F1-NW50-316L
Stainless Steel Filter Media, higher operating pressures, over 3 million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: 316L SS
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 3,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 60 psig (4.0 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 75 psid (5.0 bar) |
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NW100 Disc Type Gas Diffuser
GSD-FLG-3.6-F1-NW100-0.5-316L
316L SS Filter Media, higher operating pressures, over one million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: 316L SS
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 1,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 60 psig (4.2 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 75 psid (5.0 bar) |
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NW50 C-22 Disc Type Gas Diffuser
GSE-FLG-2.0-F1-NW50-C22
Hastelloy C-22 diffusers, Superior corrosion resistance, higher operating pressures, over 3 million cycles lifetime
Materials of Construction
Hardware: Hastelloy C-22,
Filter Medium: Hastelloy C-22,
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 3,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 60 psig (4.0 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 75 psid (5.0 bar)
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NW50 Tubular Type Gas Diffuser
GSD-FLG-1.00-1.450-NW50-F1-FLO (2390490-FLO-H)
Nickel Filter Media, higher operating pressures, over 2 million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: Nickel
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 2,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 100 psig (6.9 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 115 psid (7.9 bar)
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NW50 Tubular Type Gas Diffuser
GSD-FLG-1.00-0.600-1.450- NW50-F1-FLO (2390502-FLO-H)
Nickel Filter Media, higher operating pressures, over 2 million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: Nickel
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 2,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 100 psig (6.9 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 115 psid (7.9 bar)
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NW40 Disc Type Gas Diffuser
GSE-FLG-1.4-F1-NW40-316L
Stainless Steel Filter Media, higher operating pressures, over 3 million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: 316L SS
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 3,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 60 psig (4.0 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 75 psid (5.0 bar)
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NW40 Tubular Type Gas Diffuser
GSE-FLG-0.6-2.5-F1-NW40
Nickel Filter Media, higher operating pressures, over 3 million cycles lifetime
Materials of Construction
Hardware: 316L SS
Filter Medium: Nickel
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 3,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 100 psig (6.9 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 115 psid (7.9 bar)
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NW25 Tubular Type Gas Diffuser
GSE-FLG-0.6-2.5-F1-NW25
Nickel Filter Media, higher operating pressures, over 3 million cycles lifetime
GSE-FLG-0.6-2.5-F1-NW25
Materials of Construction
Hardware: 316L SS
Filter Medium: Nickel
Wetted Hardware Surface Finish: ≤ 10 Ra
Performance Specifications
Particle Removal Size: ≥ 0.0015 μm(1.5nm)
Particle Shedding: Zero particle contribution above background (<1 particle/ft3) per SEMI F43-0308 test method
Reliability: 5 years or 3,000,000 cycles at maximum operating pressure
Operating Conditions
Maximum Operating Pressure: 100 psig (6.9 barg)
Max Operating Temperature for Inert Gas: 840°F (450°C) without O-Ring; 212°F (100°C) with O-Ring
Maximum Differential Pressure: 115 psid (7.9 bar)
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Centering Ring Diffuser
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GasShield Diffusers
How to maximize through-put without compromising yield.
A simple means to increase the through-put of a tool without affecting yield is to increase the speed of any steps not related to the actual formation of the semiconductor circuit. One such step is re-pressurization or "venting" of the load lock chamber, which creates a positive-pressure environment that inhibits particle migration from the clean room into the chamber.
The challenge: Pressurize without disturbing particles.
The chamber is a contaminated environment, and pressurization can disturb the particles contained within, causing them to fall on the wafer's surface. The challenge is to pressurize as quickly as possible, but without creating jets of gas that can disturb particles.
The solution: Mott GasShield®; POU (Point-of-Use) Diffusers.
Mott porous metal can greatly reduce "vent" time of the load lock without the adverse "jet" effect seen through showerheads and simple 1/4" inlet lines. The porous metal reduces the velocity of the purge gas to ensure a uniform and laminar flow of gas into the chamber.
Alternatives to the Mott diffuser create flows with one or more, possibly non-laminar, jets of gas. Our diffusers, by comparison, have been tested for uniform flow velocity to ±5% across the entire surface.
Mott GasShield POU Diffusers consist of an element – made from process-determined materials in micron grades from 100 down to our patented NanoMetal®; media providing 9-LRV filtration – with user-specified hardware designed to allow controlled, non- disruptive filling of load lock and reactor chambers. The diffusers are carefully designed to maximize flow while minimizing pressure drop, which results in the desired, uniform diffusion of gas through the porous element into the chamber.
Packaging.
Cleaned and packaged in Class 100 clean environment.
Packaged with flow characteristics and intended use.
Nylon 6 inner bag with clean outer bag, protectively packaged to ensure product quality.
GasShield Diffuser Benefits
Reduce chamber fill and vent times without compromise
Prevent turbulent flow into chamber
Back pressure can be utilized to ensure proper gas blending
Standard configurations and various design options
Temperature capacities to 450°C
Non-flexing self-supported media
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